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Александра Громова


ДОБАВИТЬ ЗАПИСЬ | ПРОЧИТАТЬ ПОСЛЕДНЮЮ ЗАПИСЬ | Обратно на страницу Александра Громова
Архив ответов в период с 1999 по 2001 года | Еще один форум, посвященный творчеству Александра Громова

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Slim Film Coatings are from time to time utilized to whole surfaces of substrates, "wall to wall" so to converse, in a ongoing unbroken film. But a lot of times the remaining kind of whichever unique materials is becoming applied is patterned so that it is coated in specific distinct places and bare in other folks. There are two principal means to obtain this impact: 1. Subtractive, or Etch Back course of action - the total surface is coated, and then pick out parts are eradicated, leaving the wished-for pattern. The pattern generating move normally will involve some type of physical masking agent and then an suitable type of etching to clear away what must be eradicated and not problems just about anything else. 2. Additive, or Raise Off approach - the sample creating stage, which once more will usually require some form of actual physical masking agent, arrives initial. This is followed by the coating approach, which is similar to employing a stencil. Only the sought after pattern gets applied by the openings in the mask onto the genuine substrate. The extra finishes up on top of the mask and is eliminated when the mask is lifted off. This sort of Carry Off Skinny Movie Deposition procedure will be the issue of this posting. A significant thing to consider for choosing a Physical Vapor Deposition (PVD) process for Carry Off is the pattern specification. If the sample proportions and tolerances are somewhat significant, a actual physical mask such as a slender sheet metal stencil can function and the approach can be in essence any form. But for scaled-down proportions, sharper line resolution, and tighter tolerances, the mask will possibly have to be photoresist. To realize clean up traces, this photoresist is typically uncovered and made to make a destructive slope, an "overhanging" edge so that the deposition can be shadowed beneath it leaving a smaller gap between the edge of the coated line and the photoresist coverage. There are also specific twin layer photoresists for this purpose, providing a stage overhang as an alternative of a slope. And to take true edge of the functionality hence afforded, which can give excellent success in micron or more compact proportions, the deposition vapor stream ought to have a lengthy necessarily mean free of charge path and impinge on the masked substrate perpendicular to its surface. The previous requires small chamber force, generally beneath ten-four torr. And the latter generally involves a comparatively long toss - the distance from resource to substrate. For each of these good reasons, Thermal Evaporation is typically the PVD course of action of alternative. The resource is commonly located in the middle of the bottom of a vertical cylindrical chamber. The substrate holder (commonly termed tooling) is a dome rotating about a vertical axis centered above the source at a regular length of 18 inches or additional. The dome is typically curved, a portion of a sphere with some radius of curvature. For Elevate Off, this radius of curvature really should be equal to the toss length, which is the supply to substrate (dome) distance. If the resource were being a genuine mathematical position resource, it would thus be located at the center of an imaginary sphere of radius R, with the actual dome remaining the topmost portion of claimed sphere. With process pressure commonly in the 10-5 to ten-six torr variety, the suggest free route - the average distance an evaporated atom or molecule will travel in a straight line ahead of colliding with a further fuel atom or molecule - will be at least equivalent to R. And with the vapor particles all traveling in straight lines to all details on the dome, every a single is on a immediate radial line and will strike the surface of the dome perpendicular to the aircraft that would be tangent to the floor at that place. This situation provides perpendicular incidence on the curved dome surface, which is important for greatest pattern precision - a vapor stream coming in at an angle will not deposit precisely in the centre of the photoresist (mask) opening as was meant. But substrates are nearly often flat, which is a deviation from this excellent curved area and thus a deviation from entirely perpendicular incidence. A excellent rule of thumb for high precision Elevate Off styles is to keep this angular mistake, the deviation from perpendicular vapor stream impingement on the substrate, to considerably less than 5 degrees. And, for substrates such as semiconductor wafers in conventional tooling domes, the vapor stream is perpendicular at the middle of the wafer (zero angular error) and boosts towards the edges, with the highest mistake remaining dependent on the wafer diameter in relation to the throw distance. At an 18 inch toss length, a three inch wafer would as a result have a 4.8Вє optimum error at its edges, with a 4 inch wafer owning a six.4Вє mistake and greater wafers having larger faults. At a 24 inch toss distance, the 4 inch wafer"s mistake would minimize to four.8Вє with a six inch wafer staying 7.2Вє. Much larger wafers need for a longer period throw distances for higher resolution Elevate Off outcomes, and for a longer time distances also need a for a longer time imply free of charge path which usually means superior vacuum pressure. One more critical simple fact connected with Raise Off tooling as explained is that, with the throw distance becoming consistent throughout the overall dome, the intrinsic vapor deposition rate will tumble off from its utmost at the dome"s center straight above the resource to lower values approaching the perimeter. In accordance with Knudsen"s Regulation, this should comply with a theoretical cosine curve for the increasing deviation of evaporant stream angle from zero (vertical) at the middle to its greatest at the dome perimeter. This intrinsic non uniformity of the deposition thickness should be compensated by a fixed blocking mask in concerning the supply and the dome operating in combination with dome rotation to effectively block a part of the heavier central deposition to cut down it to the similar degree as the perimeter deposition. There are, of program particulars in the designed form of this mask, but without it the thickness uniformity will not be exceptional. Observe that this uniformity mask is a big scale set blocking mask at the rear of which the dome rotates, very various from the fantastic scale patterning mask (photoresist) which rotates with the dome/substrates.. As with all this kind of things, there will be facts to operate out in order to create a good functioning course of action for your end product or service. Carry Off PVD thin movie deposition processing nonetheless, can be a quite valuable tool to have offered, specifically when selective etch again is complicated or unachievable due to the distinct materials getting utilised not obtaining satisfactory selective etchants available.

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